Study of the Technology of Obtaining Thin Films in the Field of Microelectronics

Microelectronics integrated electronics vacuum integrated circuits functional microelectronics thin films thin surface

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Vol. 1 No. 4 (2021): September 2021
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September 25, 2021

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This article gives information about the field of microelectronics, its historical formation, several complementary directions of microelectronics, integral electronics, vacuum integrated circuits, functional microelectronics and the production of thin films and the study of their properties.

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